PDF(780 KB)
Extension of the Stoney formula for multilayer MEMS structure
DONG Jian,JIANG Heng,SUN Li
Journal of Zhejiang University of Technology ›› 2014, Vol. 42 ›› Issue (4) : 452-457.
PDF(780 KB)
PDF(780 KB)
Extension of the Stoney formula for multilayer MEMS structure
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