PDF(1116 KB)
Process optimization and mechanical properties of#br# AlN films prepared by PLD technique
ZHENG Xiao-hua1,KOU Yun-feng1,ZHANG Ji 1,SONG Jian-qiang1,SONG Ren-guo2
Journal of Zhejiang University of Technology ›› 2013, Vol. 41 ›› Issue (2) : 204-209.
PDF(1116 KB)
PDF(1116 KB)
Process optimization and mechanical properties of#br# AlN films prepared by PLD technique
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