PDF(380 KB)
The effect of target-substrate distance on performance of CrTiAlN film
JIN Jie,LI Na,TIAN Zheng-lei,LI Hao
Journal of Zhejiang University of Technology ›› 2013, Vol. 41 ›› Issue (1) : 73-75.
PDF(380 KB)
PDF(380 KB)
The effect of target-substrate distance on performance of CrTiAlN film
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