Ｅｆｆｅｃｔ　ｏｆ　ｒｅｓｉｄｕａｌ　ｓｔｒｅｓｓ　ｏｎ　ｔｈｅ　ｉｎｄｅｎｔａｔｉｏｎ－ｉｎｄｕｃｅｄ　ｃｒａｃｋｉｎｇ　ｏｆ#br# ｈａｒｄ　ｔｈｉｎ　ｆｉｌｍｓ　ｄｅｐｏｓｉｔｅｄ　ｏｎ　ｄｕｃｔｉｌｅ　ｓｕｂｓｔｒａｔｅｓ

ＺＨＯＵ　Ｙｉｎｇ－ｑｉａｎｇ，ＷＵ　Ｈｕａ－ｐｉｎｇ，ＣＨＡＩ　Ｇｕｏ－ｚｈｏｎｇ

Journal of Zhejiang University of Technology ›› 2012, Vol. 40 ›› Issue (5) : 544-548.

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Journal of Zhejiang University of Technology ›› 2012, Vol. 40 ›› Issue (5) : 544-548.

Ｅｆｆｅｃｔ　ｏｆ　ｒｅｓｉｄｕａｌ　ｓｔｒｅｓｓ　ｏｎ　ｔｈｅ　ｉｎｄｅｎｔａｔｉｏｎ－ｉｎｄｕｃｅｄ　ｃｒａｃｋｉｎｇ　ｏｆ#br# ｈａｒｄ　ｔｈｉｎ　ｆｉｌｍｓ　ｄｅｐｏｓｉｔｅｄ　ｏｎ　ｄｕｃｔｉｌｅ　ｓｕｂｓｔｒａｔｅｓ

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 40(5): 544-548

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